FHR Anlagenbau GmbH

Offer

FHR Anlagenbau GmbH - founded in 1991 and operating world- wide on the market is a leading German supplier of thin film processing equipment and technologies for production of electronic components and other related products and systems. The product spectra includes cluster tools, in-line tools and roll-to-roll tools together with state of the art thin film technologies for deposition and etching as well as automatic process control systems as needed for modern electronic production. FHR Anlagenbau GmbH is offering standard processes for PVD and CVD and providing customised solutions for many different applications. FHR has equipped world wide leading manufacturers of electronic components and systems with thin film production lines.

FHR Anlagenbau GmbH is offering leading know-how for application of reactive sputtering technology for deposition of oxides and nitrides for various applications in electronics and optics. An innovation is the patented MAPE-ICP Plasma Source (EC invention). This high density plasma source for plasma etching and plasma CVD applications is available as a 200 mm cluster version and as a large area version for in-line applications.

Especially the utilisation of the MAPE-ICP technology for large area processing will have a high impact to develop plasma processes for new display applications.

Actual offered process innovations are the Filtered-ARC-Deposition Technology and a new ultra fast annealing technology called Flash Lamp Annealing RTP.

Another line of activities provided by FHR Anlagenbau GmbH is the manufacturing of sputtering targets for all applications. The company is leading in the production of bonded large area targets of Silicon and other materials employing the in-house metal bonding technology.

Core Competence: Equipment Manufacturer

Specializations: Vacuum Technology, Coating of Surfaces, Plasma / Ion Beam Technology, Metallization, Process Equipment

Business Fields: Semiconductor Industry, Equipment


FHR Anlagenbau GmbH is specialized in the development of innovative thin film technologies as well as in designing and constructing of client-specific vacuum coating systems. Electric conductive or insulating layers as well as electrolyte and barrier layers for energy storage devices can be deposited by various sputter and evaporating technologies.
Our inline and role-to-role coating systems allow our clients to deposit such functional layers at large areas with high deposition rates on rigid and flexible substrates such as polymer or metal foils.
Applications: thin film batteries, foil capacitors, fuel cells

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