Address
Contact
Tel: 03723 671 234 Fax: +49 3723 6711000 info-hohenstein@meyerburger.com https://www.meyerburger.com/de/Contact person
Peter FrankfurterOffer
Roth & Rau operates as an experienced producer of plasma and ion beam equipment. Based on a wide variety of own high density plasma sources (ICP, ECR) Roth & Rau offers complete systems for PECVD-and RIE-processes.
With our broad ion beam sources we supply solutions for ion beam milling and reactive ion beam processing (RIBE, CAIBE) as well as for dual ion beam deposition. The systems include up to 8 different target materials, wafer chucks with continuous rotation, tilt and magnetic alignment. With our IonScan systems we provide industry proven solutions for high precision film
thickness trimming of acoustic wave devices (BAW, SAW) and polishing error correction of high end optics.
VEMASinnovativ - Innovationsverbund Maschinenbau Sachsen - www.vemas-sachsen.de
Kompetenzzentrum Nanotechnolgie - www.nanotechnology.de