TU Dresden Fakultät Elektrotechnik und Informationstechnik - Institut für Halbleiter- und Mikrosystemtechnik (IHM)

Offer

The Institute for Semiconductor Technology and Microsystems was founded in 1990 at the Faculty of Electrical Engineering at the Dresden University of Technology. Five professorships are joined and represent education and research in the fields of Semiconductor Technology, Microsystems, Optoelectronic Components and Systems, Polymer Microsystems and Nanoelectronic Materials. The main topics in the research work are concentrated on the Back-End-of-Line, advanced deposition technologies for ultrathin functional films, deposition methods for photovoltaic, the functional characterization of materials, electronic elements and systems, including organic transistors, the design of Microsystems and the fabrication of sensors and actuators based on inorganic and organic materials. The close personal alliance with the Fraunhofer IPMS Dresden and the NaMLab gGmbH increases the opportunities in education and research significantly.

research focus: Microsystems Technology, Nanotechnology, Optoelectronic Devices and Systems

research subjects:
- Adaptive Optic, Micromirrow Arrays, Microscanner
- Charakterization of MEMS
- CVD, RIE, PVD, CMP, ECD
- Nanooptic und Nanophotonic
- NOEMS
- Oxydation
- Simulation MOEMS
- System Design

Core Competence: Research Institute
Specializations: Semiconductor Technology, Microsystems Technology, Optoelectronic Devices and Systems
Business Fields: Semiconductor Industry, Automotive Industry, Electronics

research category: engineering science
research discipline: electrical engineering

The IHM of the Dresden University of Technology links three professorships together.

The professorship "Semiconductor Technology" of Prof.Dr.rer.nat. Johann W. Bartha is dedicated to the education and research for integrated circuit manufacturing. Focuses within this field are new materials, ultra thin films, and the back end of line with chip interconnect technology.

The professorship "Microsystems Technology" of Prof.Dr.-Ing.habil. Wolf-Joachim Fischer is directed to design, simulation, fabrication and qualification of microsystems. The topics centre on processing devices from liquids, SAW devices, gas sensors, self sufficient power supply, and microsystems in medical science.

The professorship "Optoelectronics Devices and Systems" of Prof.Dr.-Ing. Hubert Lakner covers the education and research of the design, the manufacturing and the application of Microoptical, Optoelectrical, and Microopto-electromechanical Systems.

research focus: Microelectronics, Microsystems, Microtechnology, Nanotechnology, Optoelectronic Devices and Systems

research subjects:
- ALD, CVD, PVD, ECD, RIE, CMP
- high-k-dielectrics, low-k-dielectrics, barrier layers, magnetic films
- medical sensor systems
- organic semiconductror devices and sensors
- micro- and nanocharacterization
- systems design
- MEMS, MOEMS, NOEMS
- nanooptics, nanophotonics

Trades