Advanced Mask Technology Center GmbH & Co. KG

Offer

The Advanced Mask Technology Center GmbH & Co. KG (AMTC) is a Joint Venture of GLOBALFOUNDRIES und Toppan Photomasks, Inc.. One of the world’s leading centers for research and development as well as pilot production for advanced photomasks, the AMTC strengthens the technology leadership of its partner companies by providing leading-edge masks: single exposure und double patterning for 193nm and 193 nm Immersion lithography tools as well as EUV lithography. Those masks allow the customer to print features on the wafer that are smaller than the illumination wavelength.

Photomasks are high-purity glass plates with precise images of integrated circuit designs. They are used as masters to optically transfer these images onto silicon wafers.

Thanks to AMTC, the integration of R&D and customer-specific production has changed from vision to reality. The close cooperation of R&D (AMTC) and production (Toppan Photomasks Germany) as well as the exchange of know-how with the wafer fabs ensures short innovation cycles and a close interaction within mask making.

Resist Coating
E-beam Writing
Laser Writing
Resist Development
Dry Etch
Optical, AFM und SEM Measurements
Defect Inspection
Cleaning
Laser, Ion beam und E-beam Repair sowie Nanomachining
Ion und E-beam Induced Gas Deposition Repair

Trades