Freiberg Instruments GmbH

Offer

The objective of the company is the development and production of a new family of state of the art contactless and non destructive inline measurement tools for the semiconductor industry and research facilities.These measurement techniques open for the first time the possibility to measure electrical parameters such as lifetime, diffusion length and mobility of charge carriers with so far not achieved sensitivity. This allows for a combination of high spatial resolution, high measurement speed even at very low injection levels. These unusual combination of properties make the methods ideally suited for inline applications. Again owing to the high sensitivity, it is even possible to expand the measurements to the investigation of thin epitaxial layers as found in device fabrication. A special kind of these techniques allows for contactless, non destructive and topographic investigations of defect properties.A large variety of semiconductor materials can be investigated. Many processing steps can be followed ranging from the preparation of the starting material till to the final device ready for packaging.

Core Competence: Equipment Manufacture

Specializations: Test Equipment, Physical Metrology, Defect Analytics

Business Fields: Semiconductor Industry, Equipment

Freiberg Instruments GmbH is a young and fast growing high tech company established in 2005 as an university spin off from TU Bergakademie - The University of Resources, Freiberg. The first years have been devoted to develop and test a whole family of fast, non destructive, electrical characterization tools under production conditions, measuring parameters like minority carrier lifetime, photoconductivity and resistivity. We consider it important to have state of the art reliability and serviceability of all tools. The tools have been released to international customers not before 2008 having an installed base of more than 150 tools in Europe, USA and OEM units for different applications around the globe.

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